Multi dimensional virtual experimental apparatus and method for nano device design

摘要

Disclosed is a virtual experimental apparatus and method for a nano device design. The virtual experimental apparatus for a nano device design includes a virtual work piece determining unit for determining a virtual experimental material for a nano device design, a virtual process experimental unit for applying at least one process to the virtual experimental material determined by the virtual work piece determining unit, and a virtual process analyzing unit for analyzing a result of each process applied to the virtual experimental material by the virtual process experimental unit. The virtual process analyzing unit further includes a multi-scale analyzing unit for analyzing the process result in at least one particle level.