METHOD FOR COMPENSATING CHROMATIC ABERRATION, AND METHOD AND APPARATUS FOR MEASURING THREE DIMENSIONAL SHAPE BY USING THE SAME

摘要

chromatic aberration compensation method, three-dimensional shape measurement methods and measuring apparatus using the same are disclosed. The chromatic aberration compensation method comprising the steps of: obtaining a reference phase shift amount of the reference phase shift amount of the red light, the reference phase shift amount of the green light and the blue light, the red light of the mean intensity, the average intensity and phase, and the red light to obtain the average intensity of the blue light of the green light reference phase changing amount, the green light and the average intensity change of the reference phase of the reference phase change amount of the blue light and the red light, the intensity and the average intensity by using the average of the blue light of the green light comprises the step of obtaining the face offset. Therefore, it is possible to more accurately measure the three-dimensional shape to correct chromatic aberration of the measurement object and coming from the different colors formed on the substrate and the substrate. ;