method for manufacturing flexible film nanogenerator and flexible nanogenerator manufactured by the same

摘要

PURPOSE: A method for manufacturing a flexible thin film nanogenerator using laser lift-off and the flexible thin film nanogenerator manufactured by the same are provided to separate a sacrificial substrate from the nanogenerator by gasifying hydrogen of an amorphous silicon layer. CONSTITUTION: A separating layer(800) is formed on the front of a sacrificial layer. High efficiency thin film piezoelectric materials are deposited on the separating layer. A laser is irradiated to the rear of the sacrificial layer. The separating layer is removed. The thin film piezoelectric materials separated from the sacrificial substrate are transferred on the flexible substrate.