OPTICAL CHARACTERISTIC MEASUREMENT PLATFORM FOR SEMICONDUCTOR NANOWIRE AND OPTICAL CHARACTERISTIC MEASUREMENT METHOD FOR SEMICONDUCTOR NANOWIRE USING SAME

摘要

The present invention relates to an optical characteristic measurement platform for a semiconductor nanowire and an optical characteristic measurement method for a semiconductor nanowire using the same. According to the present invention, an optical characteristic measurement platform for a semiconductor nanowire and an optical characteristic measurement method for a semiconductor nanowire using the same performs the optical property analysis of an accurate nanowire by using incident high density light. By this, composition, thickness, defect in the specific region of the nanowire are accurately analyzed.;COPYRIGHT KIPO 2014