Method for forming nanostructure or poly silicone using microheater, nanostructure or poly silicone formed by the method and electronic device using the same

摘要

The present invention significantly reduces power consumption and large-area artist as micro- heater unit or array , carbon nanotubes , to grow the nanostructures of the gallium zinc oxide nanowire or nanowires , or how to convert the amorphous silicon into polycrystalline silicon , this invention relates to nanostructured or polycrystalline silicon and electronic apparatus using those formed in accordance with . According to the invention , the processing equipment without the need for a separate high temperature local to the carbon nanotubes , GaN nanowire , the nano- structure or a polycrystalline silicon such as a zinc oxide nanowire can be particularly formed in a low power consumption and a large area .