COMPUTER-IMPLEMENTED METHODS FOR DETECTING AND/OR SORTING DEFECTS IN A DESIGN PATTERN OF A RETICLE

摘要

a variety of computer-implemented method are provided. One method for classifying the defect in the design pattern of the reticle, with the one or more characteristics of the region adjacent to the individual defects, using the priority information associated with each defect in the defect inspection method comprising: retrieving data of interest includes. Priority information corresponds to the modulation level is associated with the individual defect. Inspection data is generated by comparing the image of the reticle generated for different values of the lithographic parameters. Image comprise one or more reference images and the one or more modulated images. Synthetic reference image can be generated from two or more reference images. The method also includes the step of assigning one or more identifiers of interest to the defect. Identifier (s) is, for example, defect classification and / or defects of interest may comprise an indicator identifying should be used in further processing.