PRESSURE CONTROL DEVICE, FLOW RATE CONTROL DEVICE AND RECORDING MEDIUM HAVING PROGRAMS USED FOR PRESSURE CONTROL DEVICE, RECORDING MEDIUM HAVING PROGRAMS USED FOR FLOW RATE CONTROL DEVICE

摘要

When a gain such as a PID variable is largely set, a pressure control device prevents ringing or an overshoot without changing the gain. When a large setting pressure value is set, the pressure control device changes the gain up to a normal state in a short time. Provided is the pressure control device capable of distributing the time of changing the gain up to the normal state without a setting pressure value. A valve control unit (3) comprises an opening control amount output unit (31) and a remitter unit (32). The opening control amount output unit outputs the opening control amount of the pressure control valve based on a measured pressure value and the setting pressure value. The remitter unit controls the pressure control valve with the opening control amount of an upper value. [Reference numerals] (1) Pressure sensor; (2) Valve (Input control valve); (31) PID (Opening control amount output unit); (32) Variable remitter (Remitter unit); (AA) Pressure setting value; (MV) Opening control amount; (P) Pressure; (V) Applied voltage