首页>
外国专利>
TREATMENT OF A SELF-ASSEMBLED MONOLAYER ON A DIELECTRIC LAYER FOR IMPROVED EPOXY ADHESION
TREATMENT OF A SELF-ASSEMBLED MONOLAYER ON A DIELECTRIC LAYER FOR IMPROVED EPOXY ADHESION
展开▼
机译:在介电层上自组装单层膜的处理,以改善环氧树脂的附着力
展开▼
页面导航
摘要
著录项
相似文献
摘要
This disclosure provides systems, methods, and apparatus for treating a self-assembled monolayer coating on a dielectric layer to improve epoxy adhesion to the self-assembled monolayer coating. In implementations of the methods, a dielectric layer on a surface of a substrate is provided. A self-assembled monolayer coating is formed on the dielectric layer. A seal region of the self-assembled monolayer coating is selectively treated. A component is bonded to the seal region of the self-assembled monolayer coating with an epoxy. Implementations of the methods may be used to encapsulate an electromechanical systems device on the substrate with a cover using an epoxy.
展开▼