PHOTORESIST STRIPPING SOLUTION, STRIPPING SOLUTION RECYCLING SYSTEM AND OPERATING METHOD, AND METHOD FOR RECYCLING STRIPPING SOLUTION

摘要

Provided is a stripping solution recycling system using a photoresist stripping solution that strips a photoresist without damaging a Cu film or reducing the adhesiveness to a layer deposited on the Cu film, when a Cu film or Cu alloy film on a large-area substrate is wet-etched to make wiring or the like. The stripping solution recycling system has a resist stripping device for repeatedly using a stripping solution; a distillation and regeneration device for distilling the stripping solution in the waste tank; a component analyzer for investigating the composition ratio of the main agent and the polar solvent in the separated liquid; a preparation device for preparing the mixed solution; and a supply tank for storing the mixed solution.