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PHOTOACID GENERATING COMPOUND, PHOTORESIST COMPOSITION COMPRISING SAME, COATED ARTICLE COMPRISING PHOTORESIST, AND MANUFACTURING METHOD OF COATED ARTICLE
PHOTOACID GENERATING COMPOUND, PHOTORESIST COMPOSITION COMPRISING SAME, COATED ARTICLE COMPRISING PHOTORESIST, AND MANUFACTURING METHOD OF COATED ARTICLE
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机译:产生光酸的化合物,包含相同的光致抗蚀剂的成分,包含光致抗蚀剂的被覆物品以及被覆物品的制造方法
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摘要
A compound denoted by chemical formula (I) is provided. In the chemical formula (I): a is an integer of 1-10; x is an integer of 1-3; X1 includes fluoroalcohol, fluorinated ester, or fluorinated anhydride; Y is a single bond, a C1-20 alkylene group, O, S, NR, ester, carbonate, sulfonate, sulfone, or sulfone amide, wherein R is H or C1-20 alkyl, and the C1-20 alkylene group is structured by only carbons or one or more structural carbon atoms among the C1-20 alkylene group are replaced by oxygen, carbonyl, ester, or a combination including at least one selected from the said compounds; and Ar is a substituted or non-substituted monocyclic, polycyclic, or fused polycyclic cycloalkyl group with C5 or more, or a substituted or non-substituted monocyclic, polycyclic, or fused polycyclic aryl group with C5 or more.;COPYRIGHT KIPO 2014
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