THREE-DIMENSIONAL OPTICAL STEERING DEVICE, OBJECT LENS WITH OBJECT PLANE IN FINITE SIZE, AND Z SCANNER CAPABLE OF ADJUSTING BOTH DIVERGENCE ANGLE AND BEAM DIAMETER OF EMITTED LIGHT FROM OBJECT LENS

摘要

The present invention provides a three-dimensional optical steering device capable of scanning the focus of a parallel beam, such as a laser beam, in a three-dimensional manner and maintaining the size of the focus to be small. The three-dimensional optical steering device comprises: a Z scanner for converting a parallel beam into emitted light; an XY scanner for deflecting the emitted light in the direction vertical to an optical axis; and an object lens for focusing the deflected emitted light. The object lens is preferably a finite conjugate lens in which an aperture is located on an object side and an object surface is a part of a spherical surface having a finite radius, wherein the center of the spherical surface is located at the center of the aperture.;COPYRIGHT KIPO 2014