MASK ASSEMBLY OF ALIGNER OF THIN FILM DEPOSITION SYSTEM

摘要

The invention discloses the alignment apparatus that mask position structure can minimize misalignment. Disclosed structure is included including more than first and second a positioning pins, and the mask holder facing with each other from two sides, that first and second positioning pin of connection of the online vertical direction of third positioning pin setting are formed at the position of positioning pin; The positioning pin of a large amount of long hole shapes is inserted into multiple Pin insertion apertures, on facial mask. ;The 2015 of copyright KIPO submissions