首页> 外国专利> A SUBSTRATE COATED WITH DIELECTRIC THIN-FILM LAYER, A GLAZING ASSEMBLY, A PROCESS FOR DEPOSITION ON A SUBSTRATE, AND AN INSTALLATION FOR DEPOSITION ON A SUBSTRATE

A SUBSTRATE COATED WITH DIELECTRIC THIN-FILM LAYER, A GLAZING ASSEMBLY, A PROCESS FOR DEPOSITION ON A SUBSTRATE, AND AN INSTALLATION FOR DEPOSITION ON A SUBSTRATE

机译:涂有电介质薄膜层的基材,玻璃组件,在基材上沉积的过程以及在基材上沉积的安装

摘要

The present invention relates to a substrate 1 such as a glass substrate , which at least one dielectric thin layer and is coated with , a dielectric layer , for example, is backed by a magnetic field , preferably oxygen and / or by cathode sputtering in the presence of a reactive nitrogen , the ion source (4) at least one of the ion beam (3 coming from the ) is deposited and exposed to . The present invention , the dielectric layer exposed to the ion beam is characterized in that the crystallization .
机译:基板1技术领域本发明涉及一种基板1,例如玻璃基板,其至少一个介电薄层并且涂覆有例如介电层,该介电层例如通过磁场,优选为氧气和/或通过在其中的阴极溅射来支持。在存在反应性氮的情况下,离子源(4)至少有一个离子束(3来自)沉积并暴露于。本发明的暴露于离子束的介电层的特征在于结晶。

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