ATTENUATED TOTAL REFLECTION TYPE WAVEGUIDE MODE RESONANCE SENSOR USING NANOCRYSTALLINE DIAMOND AND METHOD FOR MANUFACTURING WAVEGUIDE MADE OF NANOCRYSTALLINE DIAMOND

摘要

An attenuated total reflection (ATR) type waveguide mode resonance sensor may be configured to include a waveguide layer formed of a nanocrystalline diamond (NCD), which is configured to be in contact with a sample. It is possible to measure the angle of incidence of the incident light generated by the standing wave in the waveguide layer by the incident light incident on the ATR waveguide mode resonance sensor. The waveguide made of NCD can be formed by a hot filament chemical vapor deposition process using a raw material gas containing hydrocarbon. At this time, it is possible to control the grain size of NCD by controlling at least one of the temperature of the substrate, the distance between the filament and the substrate, and the ratio of hydrocarbon in the raw material gas.