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METHOD AND APPARATUS FOR MEASURING DRAWING POSITION, AND METHOD AND APPARATUS FOR DRAWING IMAGE

机译:用于测量绘制位置的方法和装置以及用于绘制图像的方法和装置

摘要

modulating the incident light relative to the exposure head and drawing surface for forming the drawing points on the drawing surface moving, in the imaging position measuring method for measuring a position of the imaging point in time to draw the image on the drawing surface formed by sequentially plotting point by the exposure head, a problem than the measured position of the imaging point with high precision with, and modulate the incident light and for this purpose was relatively moving the exposure head 26 and the drawing surface to form an imaging point on the drawing surface, the imaging point seedlings by the exposure head 26 by the relative movement In the position of the imaging point in time sequentially formed by drawing a picture on the screen to draw the location measurement method of measuring by the slit 74 formed on the drawing surface for detection, the exposure of the relatively moving the head with a slit for detection ( measuring the relative positional deviation of 74), and corrects the position of the drawing point, as measured by a slit (74) for detecting on the basis of the measured position error.
机译:在成像位置测量方法中,相对于曝光头和绘图面调制入射光以在绘图面上移动以形成绘图点,该成像位置测量方法用于及时测量成像点的位置以在依次形成的绘图面上绘制图像由曝光头绘制点,比成像点的测量位置具有高精度的问题,并且调制入射光,并且为此目的是相对移动曝光头26和绘图表面以在绘图上形成成像点。在表面上,通过曝光头26通过相对移动而在成像点上形成的成像点在成像点的位置上,通过在屏幕上绘制图片以通过在绘制面上形成的狭缝74进行测量的位置测量方法依次形成为了检测,相对移动的头部带有一个狭缝以进行检测(测量相对位置偏差)参照图74),并校正由狭缝(74)测量的绘图点的位置,以基于测得的位置误差进行检测。

著录项

  • 公开/公告号KR101391672B1

    专利类型

  • 公开/公告日2014-05-07

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20070082674

  • 申请日2007-08-17

  • 分类号G03F7/20;

  • 国家 KR

  • 入库时间 2022-08-21 15:40:59

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