MANUFACTURING METHOD FOR CATHODE MODULE OF X-RAY GENERATION APPARATUS USING CARBON NANOTUBE

摘要

The present invention improves the stability and durability of the structure of the carbon nanotube cathode electron sources and nanostructured materials secured to, and to be able to extend the life, the module relates to a cathode portion of the X-ray generating apparatus using a method for producing carbon nanotubes that can be commercialized by long use, emits a steady beam, chemical vapor deposition (chemical vapor deposition, CVD) a first process of growing carbon nanotubes on a substrate through; after the first process is conducted, polystyrene (polystyrene) with toluene in order to increase the bonding strength between the carbon nanotubes and the substrate (toluene ) the coated carbon nanotubes and the substrate is immersed in a solution mixed with the curing (coating) to the second process; And the process has progressed and the second, rotated at a speed of 2000 to 4000 rpm and the excess coating solution to the first step of removing, plasma etching or a cured polymer at the top of the carbon nanotubes through a laser etching method removing the carbon nanotube tip (tip) of the third step of opening from the polymer (polymer) that is cured by a second step of exposing the CNT tip; including characterized in that said ;