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HUMIDITY CONTROL APPARATUS FOR CLEAN ROOM
HUMIDITY CONTROL APPARATUS FOR CLEAN ROOM
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机译:洁净室的湿度控制装置
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摘要
The present invention relates to a humidity control apparatus for a clean room, wherein the humidity control apparatus is to control humidity inside the clean room. According to the present invention, a problem of an existing humidity control apparatus for the clean room, wherein the problem is that the expensive purified water is wasted because the part of the supplied purified water is wholly disposed, is solved so that the humidity control apparatus allowing all of supplied purified water to be utilized without being left out can prevent the purified water from being wasted, thereby reducing the operation costs of the clean room and the production costs of products manufactured in the clean room.
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