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HUMIDITY CONTROL APPARATUS FOR CLEAN ROOM

机译:洁净室的湿度控制装置

摘要

The present invention relates to a humidity control apparatus for a clean room, wherein the humidity control apparatus is to control humidity inside the clean room. According to the present invention, a problem of an existing humidity control apparatus for the clean room, wherein the problem is that the expensive purified water is wasted because the part of the supplied purified water is wholly disposed, is solved so that the humidity control apparatus allowing all of supplied purified water to be utilized without being left out can prevent the purified water from being wasted, thereby reducing the operation costs of the clean room and the production costs of products manufactured in the clean room.
机译:本发明涉及一种用于洁净室的湿度控制设备,其中,该湿度控制设备用于控制洁净室内部的湿度。根据本发明,解决了现有的无尘室用调湿装置的问题,其问题在于,由于所供应的纯净水的一部分全部被处理掉,浪费了昂贵的纯净水,因此该调湿装置允许全部供应的纯净水被利用而不会被浪费,可以防止纯净水被浪费,从而降低了洁净室的运行成本和在洁净室中制造的产品的生产成本。

著录项

  • 公开/公告号KR101412963B1

    专利类型

  • 公开/公告日2014-07-01

    原文格式PDF

  • 申请/专利权人 KOREA INSTITUTE OF ENERGY RESEARCH;

    申请/专利号KR20130084487

  • 发明设计人 MOON SEUNG HYUN;YOON HYUNG KEE;

    申请日2013-07-18

  • 分类号F24F3/14;F24F6/04;F24F13/28;

  • 国家 KR

  • 入库时间 2022-08-21 15:40:35

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