PARAMETRIC AMPLIFICATION OF A MEMS GYROSCOPE BY CAPACITANCE MODULATION

摘要

parameter amplitude of the output of the MEMS gyroscope is modulated auxiliary capacitance with applied DC voltage sensed capacitance or is obtained by . Capacitance modulation is produced by the driving motion of the gyroscope mechanism, the pump signal of the amplifier parameters is not exposed to the phase error of the electronic device . Capacitance modulation affects the ( transfer to the output electrical signal from the sensor mechanism displacement function ) electrical gain of the sensor as well as the mechanical gain of the sensor (transfer function from the input to the sensor mechanism displacement force ) . Mechanical and electrical gain of the sensor gain is dependent on the phase , while the unwanted quadrature-phase signal is attenuated , the Coriolis rate signal is amplified .