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SYSTEM AND METHOD FOR GENERATING PHYSICAL DETERMINISTIC BOUNDARY INTERCONNECT FEATURES FOR DUAL PATTERNING TECHNOLOGIES
SYSTEM AND METHOD FOR GENERATING PHYSICAL DETERMINISTIC BOUNDARY INTERCONNECT FEATURES FOR DUAL PATTERNING TECHNOLOGIES
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机译:用于双图案技术的物理确定性边界互连特征的系统和方法
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摘要
One aspect provides a system for generating a layout for dual patterning technologies. In one embodiment, the system includes: (1) a deterministic boundary interconnect feature generator configured to generate a deterministic boundary interconnect feature for a cell based on at least one dual patterning design rule; and (2) cell placement and interconnect routing tools associated with the deterministic boundary interconnect feature generator and configured to place the deterministic boundary interconnect feature and other features of the cell relative thereto.
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