APPLICATION OF DOPED ZNO FILMS ON POLYMERIC SUBSTRATES BY CHEMICAL DEPOSITION FROM A GAS PHASE UNDER UV

摘要

1. A method of forming a layer on a polymer substrate, including: (a) contacting the polymer substrate with at least one precursor; and (b) the action of ultraviolet light to degrade at least one precursor and apply a layer to the polymeric substrate. The method of forming a layer on a polymer substrate according to claim 1, wherein the at least one precursor contains a dopant. The method of forming a layer on a polymer substrate according to claim 2, wherein the dopant is at least one metal selected from the group consisting of Al, Ga, In, Tl and B. The method of forming a layer on a polymer substrate according to claim 1, wherein the at least one precursor contains zinc. The method of forming a layer on a polymer substrate according to claim 4, wherein the layer is a doped zinc oxide layer. The method of forming a layer on a polymer substrate according to claim 1, wherein the layer is a transparent electrically conductive oxide layer. The method of forming a layer on a polymer substrate according to claim 6, wherein the transparent electrically conductive oxide layer has a resistivity of less than about 1 x 10Ω cm. The method of forming a layer on a polymer substrate according to claim 1, wherein step (b) occurs at less than about 200 ° C. The method of forming a layer on a polymer support according to claim 1, wherein step (b) occurs at about 160-200 ° C. The method of forming a layer on a polymer substrate according to claim 1, wherein at least one precursor is introduced in the gas phase in step (a). The method of forming a layer on a polymeric substrate according to claim 1, wherein said contacting is carried out at approximately atmospheric pressure. The method of forming a layer on a polymer substrate according to claim 1, wherein the polymer substrate is selected from the group consisting of