MODIFICATION probes for Atomic Force Microscopy by spraying nanoparticles SOURCE ION CLUSTERS

摘要

1. A method for coating at least one AFM probe by the source ion clusters with coating material in the form nanochastits.2. A method according to claim 1, characterized in that the material is selected from the list consisting of: a metallic material, magnetic material, piezoelectric material, conductive material, insulating material, dielectric material, semiconductor material and any sochetaniya.3. A method according to claim 2, characterized in that the material is selected from a metallic material, a magnetic material or a semiconductor materiala.4. A method according to any one of claims. 1-3, wherein the gas is selected from helium, argon, oxygen, nitrogen, or any combination thereof, is used in the formation of the source klasterov.5 ionic clusters. A method according to claim 4, characterized in that the gas is selected from argon or geliya.6. A method according to any one of claims. 1-3, 5, characterized in that the method is performed under a vacuum or ultrahigh vacuum chamber attached to the ion source region formation klasterov.7 clusters. AFM probe with a coating which can be obtained by the method according to any of claims 1-6.8. Using AFM probe according to claim 7 for the determination of the morphological characteristics of the surface, determining magnetic or piezoelectric properties of objects and depositing nanoparticles.