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DEVICE AND METHOD FOR PROCESSING gaseous media and the use of said device for processing of gaseous media, liquids, solids, surfaces, or any combination

机译:用于处理气态介质的装置和方法以及所述装置在处理气态介质,液体,固体,表面或任何组合中的用途

摘要

1. Device (1) for processing a gaseous medium, comprising in the flow direction of the gaseous sredygeneriruyuschee plasma device (2) to create a plasma in a gaseous medium (21), and at least one dielectric structure (3) formed as at least one tube fused quartz, characterized in that the plasma is able to be transferred to said at least one dielectric structure (3) .2. Device (1) according to claim 1, characterized in that the gaseous medium in the direction of flow, downstream of said at least one dielectric structure (3) comprises a chamber (10) interaction, comprising an inner space (11) and at least one wall (12) .3. Device (1) according to claim 2, characterized in that said at least one wall (12) is covered at least partially diamond coating (13) .4. Device (1) according to claim 1, characterized in that no microwave radiation directed to said at least one dielectric structure (3) .5. Device (1) according to claim 2, characterized in that the chamber (10) reacting comprises at least one electrode (15) .6. Device (1) according to claim 5, characterized in that said at least one electrode (15) is partly covered with diamond coating (13) .7. Device (1) according to claim 2, characterized in that the chamber (10) comprises a multiply structure interaction (23), wherein the multiply structure (23) is covered at least partially diamond coating (13) .8. Device (1) according to claim 7, characterized in that the substantially cylindrical structure (24) is placed in the volume that covers multiply conical structure (23), wherein the cylindrical structure (24) is covered at
机译:1.一种用于处理气态介质的装置(1),其包括在气态sredygeneriruyuschee等离子体装置(2)的流动方向上以在气态介质(21)中产生等离子体的装置,以及至少一个电介质结构(3),该电介质结构形成于至少一个管式熔融石英,其特征在于,等离子体能够被转移到所述至少一个介电结构(3).2。 2.根据权利要求1所述的装置(1),其特征在于,在所述至少一个介电结构(3)的下游,沿流动方向的气态介质包括相互作用的腔室(10),所述相互作用的腔室包括内部空间(11)和至少一个内部空间(11)。一堵墙(12).3。 3.根据权利要求2所述的装置(1),其特征在于,所述至少一个壁(12)至少部分地被金刚石涂层(13).4覆盖。 2.根据权利要求1所述的设备(1),其特征在于,没有微波辐射指向所述至少一个介电结构(3).5。 3.根据权利要求2所述的装置(1),其特征在于,所述反应室(10)包括至少一个电极(15).6。 6.根据权利要求5所述的装置(1),其特征在于,所述至少一个电极(15)被金刚石涂层(13).7部分覆盖。 3.根据权利要求2所述的装置(1),其特征在于,所述腔室(10)包括多重结构相互作用(23),其中,所述多重结构(23)至少部分地被金刚石涂层(13).8覆盖。 8.根据权利要求7所述的装置(1),其特征在于,所述基本上圆柱形的结构(24)被放置在覆盖多重圆锥形结构(23)的空间中,其中所述圆柱形结构(24)被覆盖在

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