HEATER FOR GROWTH OF MONOCRYSTALS FROM MELT BY VERTICAL PULLING TECHNIQUE

摘要

FIELD: process engineering.;SUBSTANCE: proposed heater is arranged above melt in the area of crystallization front and shaped to ring-like disk. Part-through radial cut-outs are made at inner and/or outer lateral sides of said disc. Part-through radial cut-outs of inner and outer lateral sides of top heater alternate so that radial cut-outs of one lateral side are located between radial cut-outs of the other lateral side.;EFFECT: monocrystal dislocation density lower than 200 cm^-2, uniform distribution of alloying impurities suitable for production solid-state germanium plates in diameter of 100 mm and thickness of smaller than 160 mcm.;8 cl, 4 dwg