Spiral compensator for thermically compensated spiral-beam resonator for clock element, has core that is formed from non-metal material, where core is entirely covered with moisture stable layer that is provided with specific thickness

摘要

The compensator has a core (9a) that is formed from a non-metal material, where the core is entirely covered with a moisture stable layer (7). The moisture stable layer is provided with a thickness that is lower than 50Nm i.e. preferentially around 10Nm. The moisture stable layer is provided as an electrically conducting layer. The moisture stable layer is diamagnetic or paramagnetic. The non-metal material comprises doped silicon. The thickness of the moisture stable layer is allowed to take thermal compensation of the resonator into account. An independent claim is also included for a thermically compensated spiral-beam resonator.