Methods of the formation of hetero-layers with reduced surface roughness and defect density to distant surfaces and the resulting structures

摘要

The method of the formation of hetero-layers with reduced surface roughness and defect density to distant surfaces and the thereby formed components are described. In one embodiment, the method includes the provision of a substrate with a cover surface with a grating constant and the application of a first layer on the top surface of the substrate. The first layer has a top surface with a grating constant, which extends from the grating constant of the top surface of the substrate, a distinction. The first layer is annealed and polished, in order to form a polished surface. A second layer is then applied by means of the polished surface.