For coupling in a machining system for the micro - material treatment

摘要

Processing system for the micro - processing of material, comprising: a an ion beam system for machining of an object, which was prepared in advance in order by means of a laser processing; a preparation cell, in which the laser machining can be carried out; a laser for generating a laser beam for laser processing; a transmission window for an entry of the laser beam in the preparation cell; a fixing flange to a fastening of the said transmission window relative to the preparation cell; a laser beam housing, in which a chamber for strength on the outside portion of the laser beam (13); a laser protection baffle to a glare protection of a transition of the laser beam from the laser beam housing in the preparation cell in a first arrangement of the laser protection screen; wherein the laser protection screen is held displaceable to a displacement between the first arrangement and a second arrangement of the laser protection screen; wherein in the second arrangement of the transmission window and / or the mounting flange are separable from the processing system.