Apparatus for controlling temperature of vessel in chamber, during manufacture of semiconductors, has sealing device for sealing vessel standing on bottom module, and locking collar for interconnecting flange arms of successive modules

摘要

The control apparatus comprises a trough-shaped base module (10) having a bottom portion and a peripheral wall portion (24). The peripheral wall portion has a circumferential flange arm (30). A wall module (42) has a hollow cylinder formed at both sides of flange arm. A final module is arranged at an end of flange arm. A sealing device (62) is arranged for sealing a vessel standing on the bottom module, and a locking collar for interconnecting the flange arms of two successive standing modules.