Method for electrical testing of wafer, involves readjusting relative positions of test contacts and counter contacts of electrical tester to each other depending on result of renewed relative position determination

摘要

The method involves determining relative positions of test contacts (11) and counter contacts (22) of an electrical tester (1) to each other. The relative positions of the test contacts and the counter contacts are aligned to each other for executing touch contact. Electrical testing of the taking place touch contact is executed for a testing duration. The relative positions are determined again during the testing duration. The relative positions are readjusted depending on result of the renewed relative position determination. An independent claim is also included for an electrical tester comprising test contacts and counter contacts.