Method for calibrating tester used for measuring microwave components, involves recording changes in position of probes at each contact position by related to fixed reference calibration measurement on reflectance standard

摘要

The method involves making contact of an automated testing apparatus (100) to a test device at defined contact positions through the probes (10,30). The changes in position of the probes are recorded at each contact position by a related to a fixed reference calibration measurement on a reflectance standard, so that acquired disturbances are compensated by a de-embedding procedure. The laser distance measurements are performed using light barrier (25), so that exact alignment of the test probes is determined.