System for monitoring and control of photoactive components,has test system that is provided with optical measuring device, monitoring and evaluation system and adjustable diaphragm

摘要

The system has a test structure (7) that is provided with an optical measuring device (1), a monitoring and evaluation system and an adjustable diaphragm. The test structure is located on the edge or between the photo-active components. The measuring device is provided with a movable or stationary spectrometer to measure the layer thickness and/or the electrical resistance of the test structure. An independent claim is included for a method for monitoring and control of photoactive components.