Support controller for checking relative positioning of object e.g. workpiece, has pressure sensor which determines relative pressure, and distance of object with respect to bearing surface is calculated according to preset formula

摘要

The support controller has a diaphragm (5) which is arranged in measuring channel (4) leading to a measuring nozzle (2). A differential pressure sensor (6) is provided for measuring the differential pressure (pdiff) over the diaphragm. The relative pressure (prel) is determined by a pressure sensor (7), and the distance (X) of the object (3) with respect to bearing surface (1) is calculated according to preset formula, by considering the diameter of measuring nozzle, diameter of diaphragm, scale factor, offset amount, and the exponents in preset ranges.