Method for extinguishing arcs in plasma chamber of plasma system, involves driving digital-to-analog converter such that analog output of digital-to-analog converter is changed upon detection of arc

摘要

The method involves generating power during plasma operation to generate plasma in plasma chamber (6). An analog signal is generated by a digital-to-analog converter (DAC) (41) and is amplified by an amplifier path (31,32) for carrying out plasma treatment process using generated plasma. A plasma system (1) is controlled for detection of occurrence of an arc. The DAC is driven such that an analog output of the DAC is changed upon detection of an arc. An independent claim is included for power supply system.