Guiding device i.e. planar active magnet guide unit, for planar magnetic guiding of bodies for large translatory motions with e.g. linear direct drive for microlithography, has armature unit positioned between upper and lower stator-parts

摘要

The device has a permanent magnet (15a) arranged in a z-direction above a ferromagnetic intermediate part (14). Another permanent magnet (15b) is arranged in the z-direction below the intermediate part. The permanent magnets are polarized opposite to each other in the z-direction. A frame-fixed stator unit includes two planar, upper and lower stator-parts (11a, 11b), which are provided parallel to an x-y-plane. The stator-parts are ferromagnetically connected with each other by a guide coil (12), which includes a coil core (13). An armature unit is positioned between the stator-parts.