Method for facilitating homogeneous response of chemical solution on substrate surface, involves causing vibration effect to reaction vessel during transport of rotary bodies that are in contact with bottom of reaction vessel

摘要

The method involves enabling chemical solution (5a) to react with reaction solution provided in a reaction vessel (3a). A transport unit (2a) is provided with multiple rotating bodies that are transported to the reaction vessel in a back and forth direction. Vibration effect to the reaction vessel is caused during the transport of the rotary bodies that are in contact with bottom (30a) of the reaction vessel, where the reaction solution contains bath solution (1a) that is warmed up or cooled directly in order to adjust temperature of the bath solution. An independent claim is also included for an attachment for facilitating homogeneous response of a chemical solution on a substrate surface.