Arrangement for optical detection of sections, particularly sample region on sample, has inspection unit formed for optical detection of sample region, where inspection unit comprises microscope

摘要

The arrangement has an inspection unit (1a) formed for optical detection of sample region (P), where the inspection unit comprises a microscope (19b). Another inspection unit (1b) is provided, with another microscope (19d), which is spatially spaced from the former inspection unit. A positioning unit (2) is provided with which the probe is transported by the former inspection unit in the optical detection region of the latter inspection unit after the optical detection of a sample region. The sample region is optically detected by the latter inspection unit. An independent claim is included for a method for optical detection of section sections, particularly sample region on a sample.