Vacuum pump i.e. Holweck stage for turbomolecular pump, has rotor element rotatably stored in pump housing, and sealing element arranged on inside of rotor element, so that sealing gap is formed between sealing element and rotor element

摘要

The pump has a tubular rotor element (28) rotatably stored in a pump housing (10) by a rotor shaft (12), and a sealing element (40) arranged on an inside (38) of the rotor element, so that a sealing gap (44) is formed between the sealing element and the rotor element. The sealing element is arranged between the rotor element and the rotor shaft, and a gas supply device is arranged within the rotor element for supplying a gas into an inner space (46), where the sealing element completely surrounds the rotor shaft.