Corrosion and erosion-resistant mixed oxide coatings for the protection of chemical and plasma process chamber components

摘要

In a method for producing corrosion and erosion-resistant mixed oxide coatings on a metal substrate, a surface of the substrate is oxidised and converted into a first coating compound comprising a primary oxide of the metal by a plasma electrolytic oxidation (PEO) process and one or more secondary oxide compounds comprising oxides of secondary elements not present in conventional alloys of the substrate metals at significant (2 wt%) levels is added to the first oxide coating, wherein the source of the secondary element(s) is at least one of a soluble salt of the secondary element(s) in the electrolyte, an enrichment of the surface of the substrate with secondary element(s) prior to PEO processing and a suspension of the secondary element(s) or oxide(s) of the secondary element(s) applied to the oxide of the metal after this has been formed by the PEO process. Also disclosed is a corrosion and erosion-resistant mixed oxide coating on a substrate made of metal.