Corrosion and erosion-resistant mixed oxide coatings for the protection of chemical and plasma process chamber components

摘要

There is disclosed a method for producing corrosion and erosion-resistant mixed oxide coatings on a metal substrate, as well as a mixed oxide coating itself. A surface of the substrate metal is oxidized and converted into a first coating compound comprising a primary oxide of that metal by a plasma electrolytic oxidation (PEO) process. One or more secondary oxide compounds comprising oxides of secondary elements not present in conventional alloys of the substrate metals at significant (2 wt %) levels are added to the first oxide coating. The source of the secondary element(s) is at least one of: i) a soluble salt of the secondary element(s) in the electrolyte; ii) an enrichment of the surface of the substrate metal with secondary element(s) prior to PEO processing; and iii) a suspension of the secondary element(s) or oxide(s) of the secondary element(s) applied to the oxide of the metal after this has been formed by the PEO process.