Ni-BASED ALLOY EXCELLENT IN HOT FORGEABILITY, HIGH-TEMPERATURE OXIDATION RESISTANCE AND RESISTANCE TO HIGH-TEMPERATURE HALOGEN GAS CORROSION AND MEMBER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an Ni-based alloy which is suitable as a constituent material for baking trays for chip capacitors, baking trays for lithium cell positive electrode materials, members of CVD apparatuses, members of PVD apparatuses, members of LCD apparatuses, members of semiconductor production apparatuses, etc. and excellent in hot forgeability, high-temperature oxidation resistance and resistance to high-temperature halogen corrosion.SOLUTION: An Ni-based alloy comprises, by wt.%, 2.0-5.0% of Al, 0.1-2.5% of Si, 0.1-1.5% of Mn, 0.001-0.01% of B, 0.001-0.1% of Zr and remaining Ni and unavoidable impurities and is excellent in hot forgeability, high-temperature oxidation resistance and resistance to high-temperature halogen corrosion.