PACKAGE INTERNAL VOLTAGE WAVEFORM MEASURING DEVICE, INTERNAL VOLTAGE WAVEFORM CALCULATION DEVICE, PACKAGE INTERNAL VOLTAGE WAVEFORM MEASURING SYSTEM, INTERNAL VOLTAGE WAVEFORM CALCULATION METHOD AND INTERNAL VOLTAGE WAVEFORM CALCULATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To estimate an internal waveform of a package even without knowing pass characteristics of the package.SOLUTION: A package internal voltage waveform measuring device includes an internal voltage waveform calculation part for calculating an internal voltage waveform within the package from a measured external voltage waveform and a reflection characteristic within the package. The internal voltage waveform calculation part includes: a pass characteristic amplitude calculation portion for calculating an amplitude of the pass characteristic from the reflection characteristic; a pass characteristic phase calculation portion that alternately repeats inverse Fourier transformation for transforming the pass characteristic into an impulse response and Fourier transformation for transforming the transformed impulse response into the pass characteristic on the basis of a phase that is set to the amplitude of the pass characteristic, reflects the impulse response with a constraint to be satisfied in a time domain including an internal delay time within the package, and calculates the phase of the pass characteristic by substituting the amplitude of the pass characteristic with a measurement; and an internal waveform calculation part for calculating the internal voltage waveform from the reflection characteristic, the pass characteristic and the external voltage waveform.