MAGNETIC DISK SURFACE DEFECT INSPECTION DEVICE AND MAGNETIC DISK SURFACE DEFECT INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a magnetic disk surface detect inspection device, capable of outputting defect position coordinate information that enables a defect to be observed to easily fall within an observation visual field at a high magnification of a specific observation device.;SOLUTION: A magnetic disk surface defect inspection device includes: an inspection optical mechanism unit that includes a spindle, a stage moving this spindle in a uniaxial direction, a laser light source irradiating a magnetic disk mounted on and rotated by the spindle with a laser beam, and a detector detecting a reflected light from the magnetic disk; a signal processing unit processing an output signal from the detector to detect a defect; and a data processing unit processing data on the detected defect to extract information including positional information on the defect. The data processing unit processes the data on the defect detected by the signal processing unit, and outputs (X, Y) coordinate data obtained by correcting erroneous setting of the magnetic disk to the spindle as the positional information on the defect.;COPYRIGHT: (C)2015,JPO&INPIT