STRAIGHT SHAPE MEASUREMENT METHOD AND STRAIGHT SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a straight shape measurement method capable of measuring a straight shape of a surface of a measured object with high reproducibility.;SOLUTION: Three sensors aligned with equal intervals in a first direction, which are opposite to the surface of a measured object and relatively move in the first direction to the measured object, collects data of the surface height of the measured object with a sampling pitch of 1 mm or less. On the basis of the collected height data, with the sampling pitch in the first direction, a curvature is acquired at a sampling point distributed on the surface of the measured object. On the curvature, a straight shape of the surface of the measured object is acquired.;COPYRIGHT: (C)2015,JPO&INPIT