INSULATING FILM DEFECT INSPECTION APPARATUS AND INSULATING FILM DEFECT INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of detecting a defect of an insulating film by a fluctuation in voltage-current characteristics with respect to an initial voltage if a defect is present in the insulating film.;SOLUTION: An insulating film defect inspection apparatus is an apparatus for inspecting a defect generated in an insulating film of a semiconductor device which includes a schottky electrode 2 formed on a semiconductor substrate 1, an ohmic electrode 3 formed on the semiconductor substrate 1 and non-conductive to the schottky electrode 3, and an insulating film 4 formed on the schottky electrode 2, drops an electrolytic solution 5 onto the insulating film 4, applies a predetermined voltage between an electrode plate 6 immersed in the electrolytic solution 5 and the schottky electrode 2, measures changes in a voltage and a current flowing between the schottky electrode 2 and the ohmic electrode 3 from initial value characteristics, thereby inspecting a defect generated in the insulating film 4 of the semiconductor device 1.;COPYRIGHT: (C)2015,JPO&INPIT