METHOD FOR ABATING OPTICAL DAMAGES OF SILICA OPTICAL COMPONENT BASED ON OVERALL TREATMENT THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a method for abating or preventing damages brought on an optical component by a high-intensity light source (e.g., laser).;SOLUTION: In one method for preventing damages brought on an optical component by a high-intensity light source, the optical component is annealed over a specified period. Another method includes a step of etching an optical component within an etchant including one type of chemical species selected from among hydrofluoric acid, fluoride ions, and dihydrofluoride ions, a step of ultrasonically agitating the etchant between processes, and a step of subsequently rinsing the optical component within a rinsing bath.;COPYRIGHT: (C)2015,JPO&INPIT