Ag ALLOY FILM FOR REFLECTION COATING OR WIRING ELECTRODE, REFLECTION COATING OR WIRING ELECTRODE AND Ag ALLOY SPUTTERING TARGET FOR REFLECTION COATING OR WIRING ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide an Ag alloy film which is used in a reflection electrode or a wiring electrode, shows a low electric resistivity and a high reflectance and is excellent in oxidation resistance to a cleaning treatment, e.g. UV irradiation or Oplasma treatment.SOLUTION: An Ag alloy film is formed on a substrate, is used in a reflection electrode or a wiring electrode and contains at least one of more than 2.0 atom% and equal to or less than 2.7 atom% of In, more than 2.0 atom% and equal to or less than 3.5 atom% of Zn, more than 0.5 atom% and equal to or less than 1.4 atom% of Ge. The Ag alloy film preferably contains 0.01-1.0 atom% of Bi further.