首页> 外国专利> PRODUCTION METHOD OF SAMPLE REPLICA THIN FILM FOR ELECTRON MICROSCOPY AND PRODUCTION DEVICE THEREOF

PRODUCTION METHOD OF SAMPLE REPLICA THIN FILM FOR ELECTRON MICROSCOPY AND PRODUCTION DEVICE THEREOF

机译:电子显微镜样品复制薄膜的生产方法及其生产装置

摘要

PROBLEM TO BE SOLVED: To provide a production method of a sample replica thin film for an electron microscopy and a production device thereof, capable of precisely producing a replica of a cross sectional composition of a biological sample.;SOLUTION: An anode 11 whose contour is hemispherical shape and formed into a salient shape, and a cathode 12 whose shape is bowl-shape and formed into a recessed shape, are disposed with a constant interval in a facing state, in a gas reaction container 10 for accumulating thin films by direct current glow discharge of metal gas, and a sample holder 20 for holding a sample 4 is disposed on the cathode 12 side. A cutter blade 31 is inserted into a gap of the sample holder 20, and the cutter blade 31 contacts only an outer periphery of the sample 4, and at the same time, the sample holder 20 is developed, for dividing the sample 4 and exposing the sample 4 on a surface. The thin film is formed by direct current glow discharge on the surface.;COPYRIGHT: (C)2015,JPO&INPIT
机译:解决的问题:提供一种用于电子显微镜的样品复制品薄膜的制造方法及其制造装置,其能够精确地制造生物样品的截面组成的复制品。解决方案:阳极11的轮廓气体反应容器10为半球形,呈凸状,呈碗状且呈凹状的阴极12以一定间隔以相对的状态配置在面对面的状态的气体反应容器10中。在金属气体的电流辉光放电中,在阴极12侧配置有用于保持样品4的样品保持器20。将切割刀片31插入到样品保持器20的间隙中,并且切割刀片31仅接触样品4的外周,同时,展开样品保持器20,以用于分离样品4并暴露。样品4在表面上。通过直流辉光放电在表面上形成薄膜。版权所有:(C)2015,JPO&INPIT

著录项

  • 公开/公告号JP2015137918A

    专利类型

  • 公开/公告日2015-07-30

    原文格式PDF

  • 申请/专利权人 TANAKA AKIRA;

    申请/专利号JP20140009378

  • 发明设计人 TANAKA AKIRA;

    申请日2014-01-22

  • 分类号G01N1/28;C23C16/06;

  • 国家 JP

  • 入库时间 2022-08-21 15:33:59

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