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PRODUCTION METHOD OF SAMPLE REPLICA THIN FILM FOR ELECTRON MICROSCOPY AND PRODUCTION DEVICE THEREOF
PRODUCTION METHOD OF SAMPLE REPLICA THIN FILM FOR ELECTRON MICROSCOPY AND PRODUCTION DEVICE THEREOF
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机译:电子显微镜样品复制薄膜的生产方法及其生产装置
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摘要
PROBLEM TO BE SOLVED: To provide a production method of a sample replica thin film for an electron microscopy and a production device thereof, capable of precisely producing a replica of a cross sectional composition of a biological sample.;SOLUTION: An anode 11 whose contour is hemispherical shape and formed into a salient shape, and a cathode 12 whose shape is bowl-shape and formed into a recessed shape, are disposed with a constant interval in a facing state, in a gas reaction container 10 for accumulating thin films by direct current glow discharge of metal gas, and a sample holder 20 for holding a sample 4 is disposed on the cathode 12 side. A cutter blade 31 is inserted into a gap of the sample holder 20, and the cutter blade 31 contacts only an outer periphery of the sample 4, and at the same time, the sample holder 20 is developed, for dividing the sample 4 and exposing the sample 4 on a surface. The thin film is formed by direct current glow discharge on the surface.;COPYRIGHT: (C)2015,JPO&INPIT
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