METHOD OF MANUFACTURING FUNCTIONAL DEVICE, THE FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING BODY

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a functional device having high a Q value and high stability, the functional device manufactured by the manufacturing method, and an electronic apparatus and a moving body equipped with the functional device.;SOLUTION: A method of manufacturing a functional device 100 includes: a step for preparing a sealing member 40 and a package 50 in which a housing space 52 is provided and a functional element 20 having a movable body is housed in the housing space 52 and which has a through-hole 32; a melting step for melting the sealing member 40a under a reduced-pressure atmosphere; and a sealing step for arranging the sealing member 40a melted in the melting step in the through-hole 32 and melting the sealing member 40a under the reduced-pressure atmosphere.;COPYRIGHT: (C)2015,JPO&INPIT