公开/公告号JP2015195388A
专利类型
公开/公告日2015-11-05
原文格式PDF
申请/专利权人 MARUBUN CORP;TOSHIBA MACH CO LTD;INSTITUTE OF PHYSICAL & CHEMICAL RESEARCH;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;ULVAC JAPAN LTD;TOKYO OHKA KOGYO CO LTD;
申请/专利号JP20150119913
发明设计人 KASHIMA YUKIO;MATSUURA ERIKO;KOKUBO MITSUNORI;TASHIRO TAKAHARU;OKAWA TAKASHI;HIRAYAMA HIDEKI;YOUN SUNG-WON;TAKAGI HIDEKI;KAMIMURA RYUICHIRO;OSADA YAMATO;SHIMATANI SATOSHI;
申请日2015-06-15
分类号H01L33/20;H01L33/10;
国家 JP
入库时间 2022-08-21 15:33:55