LIGHT INTENSITY DISTRIBUTION MEASURING DEVICE, DRAWING DEVICE, AND LIGHT INTENSITY DISTRIBUTION MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To measure light intensity distribution of linear light repeatedly and accurately with a simple constitution.;SOLUTION: A light intensity distribution measuring device 4 includes a mask unit 41 having a cylindrical irradiation surface 412 and a light intensity measurement unit 42 provided inside the mask unit 41. Linear light from a head unit 3 that emits the linear light irradiates the irradiation surface 412, and a linear irradiation region 415 parallel to the center axis J1 of the irradiation surface 412 is formed. The irradiation surface 412 continuously rotates about the center axis J1. The irradiation surface 412 is provided with a slit 414 inclined with respect to the center axis J1. If the slit 414, which is a linear transmission region, is interpreted as being an aggregation of a plurality of transmission region components arranged continuously in a line, the plurality of transmission region components pass through a plurality of different positions on the linear irradiation region 415 at different timings, and the light transmitted through the transmission region components is received by the light intensity measurement unit 42. Thus, light intensity distribution of linear light can be measured repeatedly and accurately with a simple constitution.;COPYRIGHT: (C)2015,JPO&INPIT