THERMO COUPLE FOR HEATER TEMPERATURE MEASUREMENT, HEATER TEMPERATURE MEASUREMENT DEVICE, AND TEMPERATURE MEASUREMENT METHOD OF HEATER TIP

摘要

PROBLEM TO BE SOLVED: To measure temperature of a heater tip such as a pulse heater only by bringing a heater into contact to a temperature sensitive part of a thermo couple without processing the heater, easily and correctly.;SOLUTION: The heater temperature measurement device comprises: two thermo couple lines 22, 24 disposed so as not to cross each other and formed of different metal; and a third thermo couple line 26 bridged between the two thermo couple lines 22, 24 and jointed, and formed of the same metal as that forming one of the two thermo couple lines 22, 24. In addition, plural thermo couples 20 having a temperature sensitive part which is a joint position (23 or 25) between the other of the two thermo couple lines and the third thermo couple line, are provided.;COPYRIGHT: (C)2015,JPO&INPIT